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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Damascene Metal Gate Technology for Gentle Integration of Crystalline High-K-Gate Dielectrics
Endres, Ralf, Stefanov, Yordan, Schwalke, UdoVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356289
File:
PDF, 683 KB
english, 2006