High quality diamond formation by electron temperature control in methane–hydrogen plasma
Shimizu, Tetsuji, Iizuka, Satoru, Kato, Kohgi, Sato, NoriyoshiVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/4/316
Date:
November, 2003
File:
PDF, 336 KB
english, 2003