Oxidation of nanopores in a silicon membrane: self-limiting formation of sub-10 nm circular openings
Zhang, Miao, Schmidt, Torsten, Sangghaleh, Fatemeh, Roxhed, Niclas, Sychugov, Ilya, Linnros, JanVolume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/35/355302
Date:
September, 2014
File:
PDF, 1.54 MB
english, 2014