Micromachined array-type Mirau interferometer for parallel inspection of MEMS
Albero, J, Bargiel, S, Passilly, N, Dannberg, P, Stumpf, M, Zeitner, U D, Rousselot, C, Gastinger, K, Gorecki, CVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/065005
Date:
June, 2011
File:
PDF, 921 KB
english, 2011