Surface Modification of Stainless Steel with Ti–Si–C Thin Films by Magnetron Sputtering Using Elemental Targets at Low Preparation Temperatures
Sonoda, Tsutomu, Nakao, Setsuo, Ikeyama, MasamiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NJ14
Date:
November, 2013
File:
PDF, 910 KB
english, 2013