Silicon photodiode with selective Zr/Si coating for extreme...

Quantum Electronics 2012 / 10 Vol. 42; Iss. 10

Silicon photodiode with selective Zr/Si coating for extreme ultraviolet spectral range

Aruev, P N, Barysheva, Mariya M, Ber, B Ya, Zabrodskaya, N V, Zabrodskii, V V, Lopatin, A Ya, Pestov, Alexey E, Petrenko, M V, Polkovnikov, V N, Salashchenko, Nikolai N, Sukhanov, V L, Chkhalo, Nikola
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Volume:
42
Language:
english
Journal:
Quantum Electronics
DOI:
10.1070/QE2012v042n10ABEH014901
Date:
October, 2012
File:
PDF, 1.10 MB
english, 2012
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