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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Reliability, Testing, and Characterization of MEMS/MOEMS II - Degradation of monolayer lubricants for MEMS
Dugger, Michael T., Hohlfelder, Robert J., Peebles, Diane E., Ramesham, Rajeshuni, Tanner, Danelle M.Volume:
4980
Year:
2003
Language:
english
DOI:
10.1117/12.478194
File:
PDF, 660 KB
english, 2003