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[IEEE 2015 International Conference on Microelectronic Test Structures (ICMTS) - Tempe, AZ (2015.3.23-2015.3.26)] Proceedings of the 2015 International Conference on Microelectronic Test Structures - Electromagnetic field test structure chip for back end of the line metrology
Lin You,, Jung-Joon Ahn,, Hitz, Emily, Michelson, Jonathon, Yaw Obeng,, Kopanski, JosephYear:
2015
Language:
english
DOI:
10.1109/ICMTS.2015.7106101
File:
PDF, 1.02 MB
english, 2015