SPIE Proceedings [SPIE Second International Symposium on Fluctuations and Noise - Maspalomas, Gran Canaria Island, Spain (Tuesday 25 May 2004)] Noise and Information in Nanoelectronics, Sensors, and Standards II - Fundamental noise in MEMS force sensors
Kenny, Thomas W., Liang, Yiching, Pruitt, Beth L., Harley, Jonah A., Bartsch, Michael, Rudnitsky, Robert, Smulko, Janusz M., Blanter, Yaroslav, Dykman, Mark I., Kish, Laszlo B.Volume:
5472
Year:
2004
Language:
english
DOI:
10.1117/12.549814
File:
PDF, 136 KB
english, 2004