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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Micromachining and Microfabrication Process Technology XVIII - Eliminating stiction in NEMS and MEMS release: parameter optimization for an HF vapor process operating at room temperature and ambient pressure
Pollet, O., Segaud, R., Marcoux, C., de Crecy, F., Maher, Mary Ann, Resnick, Paul J.Volume:
8612
Year:
2013
Language:
english
DOI:
10.1117/12.2004135
File:
PDF, 650 KB
english, 2013