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Simulation of plasma doping process by using the localized molecular dynamics method
Hui-Hui, Ji, Min, Yu, Li-Ming, Ren, Xing, Zhang, Ru, Huang, You-Guang, ZhangVolume:
17
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/17/9/047
Date:
September, 2008
File:
PDF, 209 KB
english, 2008