Stiction of a Nano-Beam with Surface Effect

Stiction of a Nano-Beam with Surface Effect

Liu, Jian-Lin, Xia, Re, Zhou, Yue-Ting
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Volume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/11/116201
Date:
November, 2011
File:
PDF, 2.00 MB
english, 2011
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