Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Gao, Xindong, Andersson, Joakim, Kubart, Tomas, Nyberg, Tomas, Smith, Ulf, Lu, Jun, Hultman, Lars, Kellock, Andrew J., Zhang, Zhen, Lavoie, Christian, Zhang, Shi-LiVolume:
14
Year:
2011
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3580618
File:
PDF, 524 KB
english, 2011