Characterization of Deposited Films and the Electron Beam...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

Characterization of Deposited Films and the Electron Beam Generated in the Pulsed Plasma Deposition Gun

Yarmolich, Dmitry, Nozar, Petr, Gleizer, Svetlana, Krasik, Yakov E., Mittica, Giuseppe, Ancora, Cosimo, Brillante, Aldo, Bilotti, Ivano, Taliani, Carlo
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JD03
Date:
August, 2011
File:
PDF, 708 KB
english, 2011
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