Optical Emission Spectroscopic Studies of ICP Ar Plasma

Optical Emission Spectroscopic Studies of ICP Ar Plasma

Xuelian, Qi, Chunsheng, Ren, Jian, Zhang, Tengcai, Ma
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Volume:
9
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/9/5/13
Date:
October, 2007
File:
PDF, 659 KB
english, 2007
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