Optical Emission Spectroscopic Studies of ICP Ar Plasma
Xuelian, Qi, Chunsheng, Ren, Jian, Zhang, Tengcai, MaVolume:
9
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/9/5/13
Date:
October, 2007
File:
PDF, 659 KB
english, 2007