Design considerations for a cascaded grating interferometer...

Design considerations for a cascaded grating interferometer suitable for extreme ultraviolet interference lithography

Levine, Zachary H.
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3112008
Date:
April, 2009
File:
PDF, 420 KB
english, 2009
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