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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MEMS Reliability for Critical Applications - Mechanical effects of fatigue and charge on CMOS MEMS
Frederick, Kevin M., Fedder, Gary K., Lawton, Russell A.Volume:
4180
Année:
2000
Langue:
english
DOI:
10.1117/12.395699
Fichier:
PDF, 531 KB
english, 2000