Application of a focused laser beam in a grating...

Optical Engineering 1999 / 06 Vol. 38; Iss. 6

Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements

Dobosz, Marek
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Volume:
38
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.602136
Date:
June, 1999
File:
PDF, 298 KB
english, 1999
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