![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Micromachining and Microfabrication Process Technology XVI - Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics
Langehanenberg, Patrik, Dumitrescu, Eugen, Heinisch, Josef, Krey, Stefan, Ruprecht, Aiko K., Maher, Mary Ann, Chiao, Jung-Chih, Resnick, Paul J.Volume:
7926
Year:
2011
Language:
english
DOI:
10.1117/12.874628
File:
PDF, 402 KB
english, 2011