Effect of indium as a surfactant in (Ga 1− x In x ) 2 O 3 epitaxial growth on β -Ga 2 O 3 by metal organic vapour phase epitaxy
Baldini, M, Albrecht, M, Gogova, D, Schewski, R, Wagner, GVolume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/2/024013
Date:
February, 2015
File:
PDF, 1.31 MB
english, 2015