Formation of Diamond-Like Carbon Films by...

Japanese Journal of Applied Physics 2013 / 11 Vol. 52; Iss. 11R

Formation of Diamond-Like Carbon Films by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition

Yang, Meng, Takabayashi, Susumu, Ogawa, Shuichi, Hayashi, Hiroyuki, Ješko, Radek, Otsuji, Taiichi, Takakuwa, Yuji
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.110123
Date:
November, 2013
File:
PDF, 2.00 MB
english, 2013
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