Ion-implanted Mechanism of the Deposition Process for...

Chinese Physics Letters 2011 / 01 Vol. 28; Iss. 1

Ion-implanted Mechanism of the Deposition Process for Diamond-Like Carbon Films

Wang, Xue-Min, Wu, Wei-Dong, Wang, Yu-Ying, Wang, Hai-Ping, Ge, Fang-Fang, Tang, Yong-Jia, Ju, Xin
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Volume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/1/016102
Date:
January, 2011
File:
PDF, 245 KB
english, 2011
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