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SPIE Proceedings [SPIE Photonics Taiwan - Taipei, Taiwan (Wednesday 26 July 2000)] Optoelectronic Materials and Devices II - Sensing characteristics of ISFET based on AlN thin film
Chiang, Jung Lung, Su, Yan-Kuin, Bhattacharya, Pallab, Jan, Shiun-Sheng, Chen, Ying-Chung, Chou, Jung ChuanVolume:
4078
Year:
2000
Language:
english
DOI:
10.1117/12.392108
File:
PDF, 435 KB
english, 2000