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SPIE Proceedings [SPIE Optical Data Storage 2007 - Portland, OR (Sunday 20 May 2007)] Optical Data Storage 2007 - Wet-etching characteristics of GeSbTe phase-change films for high density media
Kim, Jin-Hong, Lim, Jungshik, Lee, Jun-Seok, Bell, Bernard, Shimano, TakeshiVolume:
6620
Year:
2007
Language:
english
DOI:
10.1117/12.738916
File:
PDF, 2.91 MB
english, 2007