Focused ion beam lithography for fabrication of suspended...

Focused ion beam lithography for fabrication of suspended nanostructures on highly corrugated surfaces

Erdmanis, M, Sievilä, P, Shah, A, Chekurov, N, Ovchinnikov, V, Tittonen, I
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/33/335302
Date:
August, 2014
File:
PDF, 10.71 MB
english, 2014
Conversion to is in progress
Conversion to is failed