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Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy
Shinohara, Masanori, Taniguchi, Yujiro, Takaki, Yuya, Matsuda, Yoshinobu, Fujiyama, HiroshiVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.096202
Date:
September, 2014
File:
PDF, 1.52 MB
english, 2014