Fabrication of large-size photonic crystals by holographic...

Journal of Micromechanics and Microengineering 2012 / 03 Vol. 22; Iss. 3

Fabrication of large-size photonic crystals by holographic lithography using a lens array

Liang, Bing, Liu, Yikun, Li, Juntao, Song, Liyan, Li, Yongyao, Zhou, Jianying, Wong, Kam Sing
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/3/035013
Date:
March, 2012
File:
PDF, 693 KB
english, 2012
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