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Maximization of layout printability/manufacturability by extreme layout regularity
Jhaveri, TejasVolume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2781583
Date:
July, 2007
File:
PDF, 1.21 MB
english, 2007