The Preparation and Characteristics of In x Ga 1− x N (0.06 ≤ x ≤ 0.58) Films Deposited by ECR-PEMOCVD
Liu, Xing-Long, Qin, Fu-Wen, Bian, Ji-Ming, Zhang, Dong, Chen, Wei-Ji, Zhou, Zhi-Feng, Zhi, An-Bo, Yu, Bo, Wu, Ai-Min, Jiang, XinVolume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/10/108104
Date:
October, 2011
File:
PDF, 1.17 MB
english, 2011