SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco,...

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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] MOEMS and Miniaturized Systems X - MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators

Hofmann, U., Eisermann, C., Quenzer, H.-J., Janes, J., Schroeder, C., Schwarzelbach, O., Jensen, B., Ratzmann, L., Giese, T., Senger, F., Hagge, J., Weiss, M., Wagner, B., Benecke, W., Schenk, Harald,
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Volume:
7930
Year:
2011
Language:
english
DOI:
10.1117/12.878676
File:
PDF, 35.50 MB
english, 2011
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