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SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas
Manske, E., Hausotte, T., Mastylo, R., Hofmann, N., Jäger, G., Duparré, Angela, Geyl, Roland, Wang, LingliVolume:
5965
Year:
2005
Language:
english
DOI:
10.1117/12.624791
File:
PDF, 1.13 MB
english, 2005