![](/img/cover-not-exists.png)
Effects of Substrate Bias on the Microstructure and Properties of a-C:H Films Deposited by MFPUMST
Dai, Hai Yang, Zhai, Feng Xiao, Cheng, Xue Rui, Su, Lei, Chen, Zhen PingVolume:
476-478
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.476-478.2344
Date:
February, 2012
File:
PDF, 482 KB
english, 2012