Defect Characterization of the Structure-Growth Zone-Model...

Materials Science Forum 2004 Vol. 445-446

Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films

De Baerdemaeker, Jérémie, Dauwe, Charles, Segers, Danny, Detavernier, C., Deduytsche, D., Egger, W., Sperr, Peter
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Volume:
445-446
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.445-446.69
File:
PDF, 363 KB
english, 2004
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