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Chemical vapor deposition of carbon films: in-situ plasma diagnostics
A.N. Obraztsov, A.A. Zolotukhin, A.O. Ustinov, A.P. Volkov, Yu.P. SvirkoVolume:
41
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0008-6223(02)00402-5
File:
PDF, 206 KB
english, 2003