Photo-Thermal Spectroscopic Imaging of MEMS Structures with...

MRS Proceedings 2012 / 1 Vol. 1415

Photo-Thermal Spectroscopic Imaging of MEMS Structures with Sub-Micron Spatial Resolution

Furstenberg, Robert, Kendziora, Christopher A., Papantonakis, Michael R., Nguyen, Viet, McGill, R. A.
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Volume:
1415
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.71
Date:
January, 2012
File:
PDF, 8.45 MB
english, 2012
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