Interfacial and Electrical Characterization of...

Interfacial and Electrical Characterization of Atomic-Layer-Deposited HfO[sub 2] Gate Dielectric on High Mobility Epitaxial GaAs/Ge Channel Substrates

Dalapati, G. K., Kumar, M. K., Chia, C. K., Gao, H., Wang, B. Z., Wong, A. S. W., Kumar, A., Chiam, S. Y., Pan, J. S., Chi, D. Z.
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Volume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3453935
File:
PDF, 1.50 MB
english, 2010
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