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Accurate control of surface chartacteristics of glass-like carbon by controlled plasma of SF6-Ar mixed gas
Yori Isumi, Hidetoshi Ishihara, Takeo Ohte, Akira KojimaVolume:
35
Year:
1997
Language:
english
DOI:
10.1016/s0008-6223(97)82806-0
File:
PDF, 127 KB
english, 1997