Evolution of Monoclinic SiAs Precipitates in Heavily As+...

Solid State Phenomena 1991 / 1 Vol. 19-20

Evolution of Monoclinic SiAs Precipitates in Heavily As+ Implanted and Isothermally Annealed Silicon

Armigliato, A., Parisini, A., Derdour, M., Lazzari, P., Moro, L., Nobili, D., Solmi, Sandro
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Volume:
19-20
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.19-20.393
Date:
January, 1991
File:
PDF, 483 KB
1991
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