O2 plasma etching of diamond-like carbon thin films...

O2 plasma etching of diamond-like carbon thin films prepared by an r. f. Plasma pulsed deposition method

H. Yamada, O. Tsuji
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Volume:
36
Year:
1998
Language:
english
DOI:
10.1016/s0008-6223(98)80010-9
File:
PDF, 130 KB
english, 1998
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