Comparison of Efficiency and Kinetics of Phosphorus-Diffusion and Aluminum Gettering of Metal Impurities in Silicon: a Simulation study
Falkenberg, M.A., Abdelbarey, D., Kveder, Vitaly V., Seibt, MichaelVolume:
156-158
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.156-158.229
Date:
October, 2009
File:
PDF, 2.13 MB
english, 2009