Sodium Enhanced Oxidation: Absence of Shallow Interface...

Materials Science Forum 2013 / 1 Vol. 740-742

Sodium Enhanced Oxidation: Absence of Shallow Interface Traps after Removal of Sodium Ions from the SiO2/4H-SiC Interface

Hermannsson, Pétur Gordon, Allerstam, Fredrik, Hauksson, Sigtryggur, Sveinbjörnsson, Einar Ö.
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.749
Date:
January, 2013
File:
PDF, 262 KB
english, 2013
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