ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Patterning with Amorphous Carbon Thin Films
Antonelli, George A., Reddy, Sirish, Subramonium, Pramod, Henri, Jon, Sims, Jim, O'loughlin, Jennifer, Shamma, Nader, Schlosser, Don, Mountsier, Tom, Guo, Wei, Sawin, HerbYear:
2011
Language:
english
DOI:
10.1149/1.3572314
File:
PDF, 2.05 MB
english, 2011