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Nanofabrication with the Helium Ion Microscope
Boden, Stuart A., Moktadir, Zakaria, Alkhalil, Feras M., Mizuta, Hiroshi, Rutt, Harvey N., Bagnall, Darren M.Volume:
1412
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.978
Date:
January, 2012
File:
PDF, 3.58 MB
english, 2012