Galvanic Corrosion of Miniaturized Polysilicon Structures

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 9

Galvanic Corrosion of Miniaturized Polysilicon Structures

Miller, David C., Gall, Ken, Stoldt, Conrad R.
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1960009
File:
PDF, 623 KB
english, 2005
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