Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 5
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Stiction-free fabrication of lithographic nanostructures on resist-supported nanomechanical resonators
Diao, Zhu, Losby, Joseph E., Burgess, Jacob A. J., Sauer, Vincent T. K., Hiebert, Wayne K., Freeman, Mark R.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4821194
File:
PDF, 255 KB
english, 2013