Nanocrystal-ZnO Thin Film Deposition by a Novel Reactive...

Advanced Materials Research 2010 / 1 Vol. 93-94

Nanocrystal-ZnO Thin Film Deposition by a Novel Reactive Gas-Timing RF Magnetron Sputtering Provided for UV Photodetectors

Panprom, P., Porntheeraphat, S., Bunjongpru, W., Tiwawong, T., Yamwong, W., Hruanun, C., Poyai, A., Nukeaw, J.
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Volume:
93-94
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.93-94.537
Date:
January, 2010
File:
PDF, 462 KB
english, 2010
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