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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - High-speed Growth and Characterization of Polycrystalline AlN Layers by High Temperature Chemical Vapor Deposition (HTCVD)
Claudel, Arnaud, Blanquet, Elisabeth, Chaussende, Didier, Martin, Rachel, Pique, Didier, Pons, MichelYear:
2009
Language:
english
DOI:
10.1149/1.3207607
File:
PDF, 382 KB
english, 2009