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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Piezoelectric Stimulation of Microcantilever Beams for Young's Modulus Determination of Amorphous Hydrogenated Silicon Carbide
Rehder, Gustavo P., Carreño, Marcelo N.Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956018
File:
PDF, 602 KB
english, 2008