Simulation of a three-moment fluid model of a two-dimensional radio frequency discharge
Mark H. Wilcoxson, Vasilios I. ManousiouthakisVolume:
51
Year:
1996
Language:
english
Pages:
18
DOI:
10.1016/s0009-2509(96)80008-x
File:
PDF, 1.52 MB
english, 1996