Structure and Microstructure of Binary Nitride TiN Thin...

Advanced Materials Research 2014 / 5 Vol. 931-932

Structure and Microstructure of Binary Nitride TiN Thin Films Deposited by DC Reactive Sputtering

Buranawong, Adisorn, Witit-Anun, Nirun, Chaiyakun, Surasing
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Volume:
931-932
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.931-932.147
Date:
May, 2014
File:
PDF, 2.03 MB
english, 2014
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